Energetic neutral particle production in the cathode sheath of direct-current discharges
نویسندگان
چکیده
Direct measurements and Monte Carlo simulations of the energy distribution of energetic neutrals incident onto the cathode of a dc glow discharge are presented. The measurements are performed by time-of-flight analysis of neutrals escaping through a cathode orifice. The experimental results are found to be in good agreement with Monte Carlo simulations. It is found that commonly-used theories for the production of energetic neutrals through charge exchange in the cathode sheath do not capture the neutral energy distribution over the range of discharge voltage studied.
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تاریخ انتشار 2007